Global visualization of powder trapping in capacitive RF plasmas by two-dimensional laser scattering
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 24 (1) , 101-102
- https://doi.org/10.1109/27.491732
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Derivation and experimental verification of a particulate transport model for a glow dischargeJournal of Applied Physics, 1995
- Spatiotemporal powder formation and trapping in radio frequency silane plasmas using two-dimensional polarization-sensitive laser scatteringJournal of Vacuum Science & Technology A, 1995
- Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactorPhysical Review E, 1995
- Ion drag and plasma-induced thermophoresis on particles in radiofrequency glow dischargesJournal of Physics D: Applied Physics, 1994
- Overview of growth and behaviour of clusters and particles in plasmasPlasma Sources Science and Technology, 1994
- Detection and modelling of electrode topography effects on particle trapsPlasma Sources Science and Technology, 1994
- Coulomb solid of small particles in plasmasPhysics of Fluids, 1986