The radiation chemistry of poly(methyl methacrylate) polymer resists

• 1 July 1988
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 6  (4) , 2221-2225
• https://doi.org/10.1116/1.575014

Abstract

Keywords

• METHYL METHACRYLATE
• RADIATION CHEMISTRY
• POLYMER RESISTS