Vapor-Phase Deposition of Beta-Silicon Carbide on Silicon Substrates

• 1 January 1973
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 120  (1) , 138
• https://doi.org/10.1149/1.2403387

Abstract

Keywords

• SILICON CARBIDE
• BETA SILICON
• SILICON SUBSTRATES
• VAPOR PHASE
• PHASE DEPOSITION