Microstructural characterization of iron ion implantation of silicon carbide
- 1 March 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 65 (1-4) , 345-351
- https://doi.org/10.1016/0168-583x(92)95064-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Ion beam modification of 6H/15R SiC crystalsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Surface softening in silicon by ion implantationJournal of Materials Science, 1984
- Structural alterations in SiC as a result of Cr+ and N+ implantationNuclear Instruments and Methods in Physics Research, 1983