Adsorption of Chlorine on TiSi2: Application to Etching and Deposition of Silicide Films
- 1 January 1996
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 143 (1) , 266-271
- https://doi.org/10.1149/1.1836420
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: