Purification and impurity detection in silicon for microelectronics
- 1 May 1986
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 75 (1) , 80-87
- https://doi.org/10.1016/0022-0248(86)90227-7
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A Neutron Activation Analysis Study of the Sources of Transition Group Metal Contamination in the Silicon Device Manufacturing ProcessJournal of the Electrochemical Society, 1981