High-precision capacitative absolute pressure sensor
- 1 May 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 17 (3-4) , 415-421
- https://doi.org/10.1016/0250-6874(89)80028-9
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- A High-Resolution Capacitance-to-Frequency ConverterIEEE Journal of Solid-State Circuits, 1985
- A Smart Digital-Readout Circuit for a Capacitive MicrotransducerIEEE Micro, 1984
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979
- Outgassing of GlassJournal of Applied Physics, 1955