Sub-micron LIGA process for movable microstructures
- 1 January 1996
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 30 (1-4) , 505-508
- https://doi.org/10.1016/0167-9317(95)00296-0
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Adhesion problems in deep-etch x-ray lithography caused by fluorescence radiation from the plating baseMicroelectronic Engineering, 1994
- Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)Microelectronic Engineering, 1986