An interferometric investigation of the thermalization of copper atoms in a magnetron sputtering discharge
- 1 February 1986
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 59 (3) , 720-724
- https://doi.org/10.1063/1.336589
Abstract
The average kinetic energy of the atoms sputtered from the copper cathode of a magnetron sputtering discharge has been deduced from the shapes of their Doppler-broadened emission lines, which were measured with a high-resolution scanning Fabry–Perot interferometer. At a fixed distance from the cathode the energy decreased with increasing sputtering gas pressure, as expected. The experimental points fell between the theoretical curves of Westwood [J. Vac. Sci. Technol. 15, 1 (1978)], and Meyer, Schuller, and Falco [J. Appl. Phys. 52, 5803 (1981)] lying somewhat closer to the former than to the latter.This publication has 15 references indexed in Scilit:
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