Particle bombardment effects on thin-film deposition: A review

• 1 May 1989
• journal article
• review article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 7  (3) , 1105-1114
• https://doi.org/10.1116/1.576238

Abstract

Keywords

• CRYSTAL GROWTH
• SURFACE AREA
• GRAIN SIZE
• THIN FILM DEPOSITION
• MOMENTUM TRANSFER
• CHARGED PARTICLES
• CHEMICAL REACTION