THE ENERGY EFFICIENCY OF LEAD SELF-SPUTTERING
- 1 August 1968
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 13 (3) , 85-86
- https://doi.org/10.1063/1.1652526
Abstract
The sputtering efficiency (i.e. ratio between sputtered energy and impinging ion energy) has been measured for 30–75‐keV lead ions impinging on polycrystalline lead. The results are in good agreement with recent theoretical estimates.Keywords
This publication has 3 references indexed in Scilit:
- Festkörperzerstäubung durch IonenbeschußPublished by Springer Nature ,2007
- Sputtering efficiency of amorphous substancesCanadian Journal of Physics, 1968
- Sputtering experiments in the high energy regionNuclear Instruments and Methods, 1961