Rapid and precise measurement of flatband voltage
- 1 May 1976
- journal article
- letter
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 47 (5) , 632-634
- https://doi.org/10.1063/1.1134705
Abstract
A simple circuit using commonly available IC’s for rapid, precise, and automatic measurement of the flatband voltage of MOS capacitors is described.Keywords
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