Real-time defect inspection of periodic patterns using self-pumped barium titanate crystal
- 15 June 1990
- journal article
- Published by Elsevier in Optics Communications
- Vol. 77 (2-3) , 135-138
- https://doi.org/10.1016/0030-4018(90)90422-p
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Bandpass filtering in barium titanateApplied Optics, 1988
- Optical surface inspection using real-time Fourier transform holography in photorefractivesApplied Optics, 1988
- Patterned wafer inspection using laser holography and spatial frequency filteringJournal of Vacuum Science & Technology B, 1988
- Real-time enhancement of defects in a periodic mask using photorefractive Bi_12SiO_20Optics Letters, 1985
- Holographic Optical Processing For Submicrometer Defect DetectionOptical Engineering, 1985
- Self-pumped, continuous-wave phase conjugator using internal reflectionOptics Letters, 1982