Microminiaturized thermistor arrays for temperature gradient, flow and perfusion measurements
- 1 May 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 27 (1-3) , 641-645
- https://doi.org/10.1016/0924-4247(91)87064-a
Abstract
No abstract availableKeywords
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- High-resolution thin-film temperature sensor arrays for medical applicationsSensors and Actuators A: Physical, 1990
- Preparation and dielectric properties of Si3N4 thin filmsThin Solid Films, 1982
- A low temperature process for the reactive formation of Si3N4 layers on InSbThin Solid Films, 1980