Measurements of the depth distribution of vacancies as produced by ions implanted in metals
- 15 March 1980
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 170 (1-3) , 399-402
- https://doi.org/10.1016/0029-554x(80)91047-2
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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