Interferometric polarization picometric profile. I. Single detector approach
- 1 September 1994
- journal article
- Published by IOP Publishing in Journal of Optics
- Vol. 25 (5) , 207-224
- https://doi.org/10.1088/0150-536x/25/5/005
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
- Picometric profilometry. II. Multidetector approach and multiplexed lock-in detectionJournal of Optics, 1995
- Limits Of Surface Measurement By Optical ProbesPublished by SPIE-Intl Soc Optical Eng ,1989
- Limits Of Surface Measurement By Stylus InstrumentsPublished by SPIE-Intl Soc Optical Eng ,1989
- Measurements of Roughness of very Smooth Surfaces 1 1Contribution of the U. S. National Bureau of Standards, not subject to copyright, except for Figures 2-10 and 15, reprinted with permission from other sources.CIRP Annals, 1987
- Optical system for measuring the profiles of super-smooth surfacesPrecision Engineering, 1985
- Measurement of surface topography of magnetic tapes by Mirau interferometryApplied Optics, 1985
- Surface profile measurement with a scanning differential ac interferometerApplied Optics, 1984
- Stylus profiling instrument for measuring statistical properties of smooth optical surfacesApplied Optics, 1981
- Optical heterodyne profilometryApplied Optics, 1981
- Measurement of phase differences in microscopy by means of phase modulation interferometryJournal of Optics, 1977