High rate photochemical deposition of amorphous silicon from higher silanes
- 1 December 1985
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 77-78, 833-836
- https://doi.org/10.1016/0022-3093(85)90789-6
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Photochemistry of silicon compounds. IV. Mercury photosensitization of disilaneJournal of the American Chemical Society, 1973