Net shape ceramic microcomponents by modified sol-gel casting

• 4 August 2000
• journal article
• Published by Springer Nature in Microsystem Technologies
• Vol. 6  (5) , 200-204
• https://doi.org/10.1007/s005420000051

Abstract

Keywords

• MEMS
• GEL
• MECHANICAL STRENGTH
• NANOPARTICLES
• SILICA
• HIGH TEMPERATURE
• HYBRID MATERIALS
• CERAMIC MICROCOMPONENTS
• SILICON