CAD system interface for a stand-alone E-beam tester

• 31 December 1987
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 7  (2-4) , 317-325
• https://doi.org/10.1016/s0167-9317(87)80026-6

Abstract

Keywords

• STAND-ALONE E-BEAM TESTER
• CAD SYSTEM INTERFACE