Monolithic Integration Of Optical Sources And Detectors

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Abstract
A review is given of recent progress in the development of integrated optical circuits involving the GaAs/A/GaAs double heterostructure system. Various devices utilizing period-ic corrugations or gratings are described briefly, whereas alternate attempts to fabricate optical circuits by chemical etching are discussed in more detail. The current trend to explore other III-V compounds is considered, with emphasis on the quaternary system InGaAsP. Recent advances in processing techniques suitable for optical integration, such as reactive-ion etching, laser and electron-beam processing, and the formation of ring lasers, are described, as well as the trend towards integration of optical and electronic devices.

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