Electron beam current measurement in the electron microscope
- 1 February 1981
- journal article
- research article
- Published by Wiley in Journal of Microscopy
- Vol. 121 (2) , 141-147
- https://doi.org/10.1111/j.1365-2818.1981.tb01207.x
Abstract
SUMMARY: Two devices for measuring the beam current in an electron microscope are described; a Faraday cage rod for accurate absolute measurements in the specimen position and a collector plate mounted in the viewing chamber, which may be used continuously during experiments, for relative current measurements. Results of experiments to determine the effect of secondary electrons on, and choice of material of, the collector plate are presented. An example of the use of the collector plate as a photometer is given.This publication has 4 references indexed in Scilit:
- Thin film x-ray spectrometryUltramicroscopy, 1978
- An optimized Faraday cage design for electron beam current measurementsJournal of Physics E: Scientific Instruments, 1975
- Backscattering of 10-100 keV electrons from thick targetsJournal of Physics D: Applied Physics, 1975
- Electron Beam-Specimen InteractionPublished by Springer Nature ,1975