Time-resolved electron energy distribution function measurements in a pulsed magnetic multipole hydrogen discharge
- 15 March 1991
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 69 (6) , 3461-3466
- https://doi.org/10.1063/1.348531
Abstract
The time evolution of measured plasma parameters, including the electron energy distribution function (EEDF), in the discharge and post-discharge regime of a pulsed hydrogen magnetic multipole plasma is presented. The time necessary for the plasma to reach equilibrium has been established as 160 μs. The present results clarify the mechanisms which initiate the discharge. The decay rates of the charged-particle density and energy in the post-discharge have been measured. These measurements indicate that particle transport to the wall is the dominant loss mechanism for both charged-particle density and energy. The time-resolved EEDF is found to be non-Maxwellian in the discharge and Maxwellian in the late post-discharge.This publication has 12 references indexed in Scilit:
- Electron energy distribution functions under N2 discharge and post-discharge conditions: A self-consistent approachChemical Physics, 1988
- Electron energy distribution function in He-CO radio-frequency plasmas: The role of vibrational and electronic superelastic collisionsJournal of Applied Physics, 1987
- Progress in the non-equilibrium vibrational kinetics of hydrogen in magnetic multicusp H− ion sourcesChemical Physics, 1987
- Electron energy distribution function measurements in a magnetic multipole plasmaJournal of Physics D: Applied Physics, 1987
- Automatic Langmuir probe plasma diagnosticReview of Scientific Instruments, 1987
- Plasma parameter measurements in a tandem multipole hydrogen plasmaVacuum, 1986
- Langmuir probe technique for plasma parameter measurement in a medium density dischargeReview of Scientific Instruments, 1986
- H− ion density measurement in a tandem multicusp dischargeReview of Scientific Instruments, 1984
- Hydrogen vibrational population distributions and negative ion concentrations in a medium density hydrogen dischargeJournal of Applied Physics, 1982
- Der NiedervoltbogenThe European Physical Journal A, 1930