Piezoelectric Thick-film Materials and Sensors
- 1 September 1995
- journal article
- Published by Emerald Publishing in Microelectronics International
- Vol. 12 (3) , 5-11
- https://doi.org/10.1108/eb044577
Abstract
The preparation, poling methods and characteristics of PZT-based thick films obtained with standard hybrid microelectronics methods are summarised. It is shown that the microstructure of the films is characterised by substantial porosity which, in turn, is responsible for the particular piezoelectric properties of the films, including low dielectric permittivity, high piezoelectric coefficients and non-linear behaviour over wide pressure ranges. The flexibility in designing piezoelectric sensors for mechanical quantities (pressure, acceleration, torque) and chemical quantities (humidity) is emphasised, with examples given of the prototypes developed. Further more, it is shown that these films offer the possibility of launching elastic waves in non-piezoelectric substrates; the structures achieved can be used for the implementation of new classes of sensors and biosensors. The advantages of thick films in comparison with ceramic materials, in terms of low voltage operation and easy change of shape, size and operating mode, is demonstrated.Keywords
This publication has 5 references indexed in Scilit:
- A novel torque sensor based on elastic waves generated and detected by piezoelectric thick filmsSensors and Actuators A: Physical, 1994
- Elastic surface wave devices based on piezoelectric thick filmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1993
- The state of the art in thick-film sensorsMicroelectronics Journal, 1992
- Resonant pressure sensor based on piezoelectric properties of ferroelectric thick filmsSensors and Actuators A: Physical, 1992
- Generation and detection of ultrasonic Lamb waves in a thin deposited film by using interdigital transducersApplied Physics Letters, 1983