Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication

Open Access

6 October 1997

book
Published by SPIE-Intl Soc Optical Eng

https://doi.org/10.1117/3.2265071

Abstract

This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.

Keywords

MICROLITHOGRAPHY
MICROMACHINING AND MICROFABRICATION
TEXTBOOK
ELEVEN
TABLES
CHAPTERS
RECIPES

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