Low-loss photonic crystal defect waveguides in InP
- 20 April 2004
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 84 (18) , 3588-3590
- https://doi.org/10.1063/1.1737487
Abstract
We have fabricated high-quality planar photonic crystal defect waveguides in InP/InGaAsP material. Using Fourier analysis of the Fabry-Pérot fringes obtained in transmission, we derive the propagation losses. Values as small as 1.8 dB/mm for waveguides consisting of three rows of missing holes (W3) were measured. We believe that the reduction in losses is due to the high quality of etching carried out using a high beam voltage–current ratio regime of chemically assisted ion-beam etching.Keywords
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