Solid-Solid Vacuum Diffusion Processes in Silicon

• 1 January 1973
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 120  (7) , 966
• https://doi.org/10.1149/1.2403608

Abstract

Keywords

• PROCESSES IN SILICON
• SOLID SOLID
• VACUUM DIFFUSION PROCESSES
• SOLID VACUUM DIFFUSION