PVD equipment design: concepts for increased production throughput
- 1 October 1995
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 74-75, 770-780
- https://doi.org/10.1016/0257-8972(95)08275-1
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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