Summary Abstract: Energy dependence of the stress in diamondlike carbon films

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 2954-2955
• https://doi.org/10.1116/1.573667

Abstract

Keywords

• SUMMARY ABSTRACT
• DIAMONDLIKE CARBON
• CARBON FILMS
• ENERGY DEPENDENCE
• STRESS