Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave

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Abstract
An electron-cyclotron resonance (ECR) plasma source which generates a long and narrow plasma 500 mm in length has been developed. The plasma is generated by a 2.45 GHz traveling microwave which is supplied through a slot antenna prepared in the waveguide in a magnetic field generated by permanent magnets. Diamond-like carbon (DLC) films were deposited in a wide zone 340 mm in width. The variation of film thickness was less than 10%. The resistivity of the DLC film was ∼9.62×1011 Ω·cm and permittivity, 3.63. The prepared Al/DLC/Si metal/insulator/semiconductor (MIS) diode revealed fairly good field effect in its capacitance-voltage curve.