Electron beam induced reactions in metal/Si systems
- 31 December 1982
- Vol. 32 (1) , 11-18
- https://doi.org/10.1016/s0042-207x(82)80189-9
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- The thermal stability of laser-produced silicide layersJournal of Applied Physics, 1980
- Review of binary alloy formation by thin film interactionsJournal of Vacuum Science and Technology, 1979
- Instrumentation for materials researchPhysics Today, 1976
- Evaluation of glancing angle X-ray diffraction and MeV 4He backscattering analyses of silicide formationThin Solid Films, 1974