Deep Centres Appearing in 6H and 4H SiC after Proton Irradiation

• 10 May 2000
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 338-342, 973-976
• https://doi.org/10.4028/www.scientific.net/msf.338-342.973

Abstract

Keywords

• COMPENSATION
• DEEP CENTERS
• DLTS
• IRRADIATION
• PROTON