Nanoscale patterning of self-assembled monolayers with electrons
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- 1 November 2000
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 18 (6) , 3414-3418
- https://doi.org/10.1116/1.1319711
Abstract
We show the fabrication of gold nanostructures using self-assembled monolayers of aliphatic and aromatic thiols as positive and negative electron beam resists. We applied a simple and versatile proximity printing technique using focused ion beam structured stencil masks and low energy (300 eV) electrons. We also used conventional e-beam lithography with a beam energy of 2.5 keV and doses from 3500 to 80 000 μC/cm2. Gold patterns were generated by wet etching in KCN/KOH and characterized by atomic force microscopy and scanning electron microscopy. The width of the finest lines is ∼20 nm; their edge definition is limited by the isotropic etching process in the polycrystalline gold.Keywords
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