Actuation of polysilicon surface-micromachined mirrors
- 8 March 1996
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 2687, 53-60
- https://doi.org/10.1117/12.234636
Abstract
Two types of polysilicon surface-micromachined actuators designed for moving hinged micromirrors are described. An electrostatic comb-drive actuator comprised of interdigitated capacitors has been used to move a mirror at frequencies of at least a kHz. Impact-actuated linear vibromotors allow mirrors to travel over large (> 100 micrometers ) ranges with submicron positioning.Keywords
This publication has 0 references indexed in Scilit: