A new thin film encapsulant for ion-implanted GaAs
- 1 April 1975
- journal article
- other
- Published by Elsevier in Thin Solid Films
- Vol. 26 (2) , L19-L22
- https://doi.org/10.1016/0040-6090(75)90157-1
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- EFFICIENT DOPING OF GaAs BY Se+ ION IMPLANTATIONApplied Physics Letters, 1969