Mean Free Path of Energetic Oxygen Atoms in the Sputtering of ZnO
- 1 July 1984
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 23 (7R)
- https://doi.org/10.1143/jjap.23.936
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- High-Energy Particles in AlN Film Preparation by Reactive Sputtering TechniqueJapanese Journal of Applied Physics, 1983
- Energy Analysis of High-Energy Neutral Atoms in the Sputtering of ZnO and BaTiO3Japanese Journal of Applied Physics, 1982
- High-Energy Neutral Atoms in the Sputtering of ZnOJapanese Journal of Applied Physics, 1981
- Mean free path of negative ions in diode sputteringJournal of Vacuum Science and Technology, 1978
- The detachment of electrons from negative ionsProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1954