Measurement of the Depth of Diffused Layers in Silicon by the Grooving Method

• 1 January 1962
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 109  (2) , 141
• https://doi.org/10.1149/1.2425346

Abstract

Keywords

• MEASUREMENT
• GROOVING METHOD
• DIFFUSED LAYERS
• LAYERS IN SILICON
• DEPTH OF DIFFUSED