Multichannel chromatic interferometry: metrology applications
- 1 January 1991
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 632-642
- https://doi.org/10.1117/12.51115
Abstract
The modulation of the spectrum of a light beam is consider as a metrological tool. In particular, double spectral modulation of a Super Luminiscent Laser Diode (SLD) is used to analyze surface's profiles. Intensity and frequency modulation allows absolute measurements of the surface without any auxiliary phase shifting. Depth and lateral resolution is determined by the spectral resolution of the involved spectroscopic devices.Keywords
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