Reactive sputtering of TiC with oxygen

• 1 August 1975
• journal article
• Published by Elsevier in Thin Solid Films
• Vol. 28  (2) , L39-L40
• https://doi.org/10.1016/0040-6090(75)90134-0

Abstract

Keywords

• REACTIVE SPUTTERING OF TIC
• SPUTTERING OF TIC WITH OXYGEN