Surface processes in MEMS technology

• 1 January 1998
• journal article
• Published by Elsevier in Surface Science Reports
• Vol. 30  (6-8) , 207-269
• https://doi.org/10.1016/s0167-5729(97)00014-9

Abstract

Keywords

• ADHESION
• CANTILEVER
• BEAM
• VACUUM
• PASSIVATION
• MICROELECTROMECHANICAL
• ATOMIC
• MICRODEVICES
• MICROMECHANICAL
• MANIPULATE