Surface kinetic study of ion-induced chemical vapor deposition of copper for focused ion beam applications
- 1 November 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 15 (6) , 3104-3114
- https://doi.org/10.1116/1.580853
Abstract
A systematic surface kinetic study of ion-induced chemical vapor deposition (II-CVD) of Cu from Cu(I) hexafluoroacetylacetonate vinyltrimethylsilane was performed using quartz crystal microbalance mass deposition rate measurements, x-ray photoelectron spectroscopy compositional analysis, and laser-induced thermal desorption coverage measurements in a multibeam scattering apparatus. With the above, a phenomenological surface kinetic model describing the adsorption, deposition (both of the desired source metal and of unwanted impurities), byproduct desorption, and sputtering processes involved in II-CVD was formulated. The surface kinetic model predicts the deposition rate, composition, and precursor coverage dependencies in agreement with experimental results.Keywords
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