MBE Regrowth of AlGaAs on Ion Etched GaAs/AlGaAs Microstructures
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Growth of single crystal SrF2(001)/GaAs(001) structures by molecular beam epitaxyApplied Physics Letters, 1984
- Large area ion beam assisted etching of GaAs with high etch rates and controlled anisotropyJournal of Vacuum Science & Technology B, 1983
- Heterostructure LasersJournal of the Electrochemical Society, 1979
- Molecular beam epitaxyProgress in Solid State Chemistry, 1975