Preparation and characterization of ultrathin porous silicon films

• 27 March 1995
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 66  (13) , 1662-1664
• https://doi.org/10.1063/1.113885

Abstract

Keywords

• SILICON
• POROUS MATERIALS
• THIN FILMS
• FABRICATION
• ELECTROCHEMISTRY
• ETCHING
• BONDING
• DIAMONDS
• MORPHOLOGY
• PHOTOLUMINESCENCE