Atomic-Scale Engineering of the SiC-SiO2 Interface

• 10 May 2000
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 338-342, 1133-1136
• https://doi.org/10.4028/www.scientific.net/msf.338-342.1133

Abstract

Keywords

• INTERFACE STATES (OR TRAPS)
• INTERFACE STRUCTURE
• NITROGEN
• OXIDATION