Anemometer with hot platinum thin film
Top Cited Papers
- 1 October 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 94 (1-2) , 32-38
- https://doi.org/10.1016/s0924-4247(01)00668-9
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- A silicon flow sensor for gases and liquids using AC measurementsSensors and Actuators A: Physical, 2000
- Wide range semiconductor flow sensorsSensors and Actuators A: Physical, 2000
- Design of a low power SnO2 gas sensor integrated on silicon oxynitride membraneSensors and Actuators B: Chemical, 2000
- The development and application of microthermal sensors with a mesh-membrane supporting structureSensors and Actuators A: Physical, 2000
- Pt/Ti Thin Film Adhesion on SiNx/Si SubstratesJapanese Journal of Applied Physics, 1999
- Two-dimensional integrated gas flow sensors by CMOS IC technologyJournal of Micromechanics and Microengineering, 1995
- Pyroelectric anemometry: Frequency, geometry and gas dependenceSensors and Actuators A: Physical, 1995
- Pyroelectric anemometry: Theory of operationSensors and Actuators A: Physical, 1995
- Silicon thermal flow sensorsSensors and Actuators A: Physical, 1992
- Fabrication and modelling of CMOS microbridge gas-flow sensorsSensors and Actuators B: Chemical, 1992