High resolution measurements of energy spectra of protons scattered from silicon crystals in the case of planar channelling

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Abstract
The energy spectrum of backscattered protons in the case of incidence along several planar directions shows a fine structure near the high-energy edge. This structure, an oscillatory dependence of the probability of backscattering vs. depth in the crystal, offers a possibility to study the proton trajectory in the lattice and also to obtain the stopping power of protons near planes in silicon. Application of a simple model for the proton trajectory yields a stopping power near the planes 4 to 5 times higher than for random incidence. These effects have been observed using primary energies in the range 40–140 keV and for incidence along (110). (111), (100) and (112) planes.