Optical properties of single-crystalline ZnO film smoothly chemical-vapor deposited on intermediately sputtered thin ZnO film on sapphire

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Abstract
ZnO‐Br2‐O2, ZnCl2‐O2, and ZnO‐H2‐H2O‐O2 chemical‐vapor‐deposition (CVD) systems are studied to obtain as‐grown optical waveguides of single‐crystalline ZnO on sapphire. The waveguide is made on a very thin sputter‐deposited epitaxial layer of ZnO on sapphire by using the ZnO‐H2‐H2O‐O2 isothermal CVD system. The minimum loss obtained for the TE0 mode propagating perpendicular to the c axis in a (112̄0) ZnO film is 0.7 dB/cm. This chemical‐vapor deposition of ZnO on a thin‐sputtered ZnO film gives a method for the fabrication of strip waveguides on sapphire due to the selective growth of the ZnO films on sputter‐deposited ZnO strips.