Structure and electrical resistivity of low pressure chemical vapor deposited silicon

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 3095-3100
• https://doi.org/10.1116/1.573635

Abstract

Keywords

• ELECTRICAL RESISTIVITY
• CHEMICAL VAPOR DEPOSITED
• LOW PRESSURE
• PRESSURE CHEMICAL
• DEPOSITED SILICON
• STRUCTURE AND ELECTRICAL