Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor
- 1 December 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Solid-State Circuits
- Vol. 26 (12) , 1998-2007
- https://doi.org/10.1109/4.104194
Abstract
A thermal absolute pressure sensor of the heated microbridge type has been integrated with an active bias circuit and an 8-b successive approximation register analog/digital (A/D) converter. The chip, which contains about 1000 devices, is sensitive to variations in absolute gas pressure between 10 and 10/sup 4/ Pa, and it is implemented in a 4-Um NMOS technology merged with the microsensor process. The output of the chip is a robust digital signal adequate for transmission in high noise environments.Keywords
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