Electromigration in Aluminum Film Stripes Coated with Anodic Aluminum Oxide Films

• 1 April 1973
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 12  (4) , 518-522
• https://doi.org/10.1143/jjap.12.518

Abstract

Keywords

• ALUMINUM FILM
• ELECTROMIGRATION
• ALUMINUM OXIDE
• OXIDE FILMS
• FILM STRIPES
• ANODIC ALUMINUM
• STRIPES COATED