Sheet resistance control of thin Cr-SiO films
- 1 September 1967
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 1 (2) , 151-164
- https://doi.org/10.1016/0040-6090(67)90011-9
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Materials and Processes for Passive Thin-Film ComponentsJournal of Vacuum Science and Technology, 1966
- Dielectric Thin Films through rf SputteringJournal of Applied Physics, 1966
- ``Flash'' Evaporator for Thin Film DepositionReview of Scientific Instruments, 1964